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Electron Microprobe Information 

Cameca SX5 equipped with five wavelength-dispersive X-ray spectrometers, and energy-dispersive X-ray system and cathodoluminescence detector. More information about this instrument can be found at the following address: 

Capabilities include:

Quantitative WDS analysis 

  • Five spectrometers, each with two or four diffracting crystals.
  • Crystals available: TAP, PET, LIF, and four pseudo crystals (PC0, PC1, PC2, and PC3)
  • Elements of atomic number 4 or greater can be detected and measured
  • Fully-automated, unattended multiple spot analysis capability
  • Analyses can be performed in beam-scanning, stage-scanning and variable size fixed-beam modes

Qualitative and quantitative EDS analysis

Backscatter electron (BSE) and Secondary Electron (SE) digital imaging

This instrument is located in the Materials Characterization Facility. More information about the facility is available at: 

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